New i-Line Stepper Canon FPA3030i5a operational
With the commissioning of the new i-Line
Stepper Canon FPA3030i5a for optical
lithography, a further milestone in the
expansion of the IMS line for 200 mm
wafers was reached in June. This means
that a state-of-the-art production facility is
now available, which opens up numerous
new opportunities for the IMS to develop
new processes for the future.