REACT-EU funding for Institut für Mikroelektronik Stuttgart

The investments are intended to expand the infrastructure available at the research facility for large-scale and flexible fabrication and characterization of various nano structures. The funds derive from the European Union’s “REACT-EU” program, which is providing support for crisis management of the COVID-19 pandemic.

“The REACT-EU funds ensure targeted investments, especially in the business-related research of the Innovationsallianz Baden-Württemberg (innBW). This way, we are support and further expand the innovativeness and competitiveness of Baden-Württemberg’s economy in digitization and climate protection,” said Minister of Economic Affairs Dr. Nicole Hoffmeister-Kraut on approving the grant.

With the acquisition of the e-beam writer and other equipment, the infrastructure for the large-scale generation of multidimensional nano structures in and on different substrates and materials will be expanded at IMS Chips. The project enables the variable fabrication of a wide variety of nano structures, these ranging from unique ones for research to masters for replicating processes on areas from a few square millimeters to the full area of 314 square centimeter wafers. Applications for these nano structures can be found in a variety of fields, such as photonics, optics and diagnostics. The goal is to develop new types of quantum sensors for use in medical and environmental technology.

Says Hoffmeister-Kraut: “The project makes a significant contribution to the implementation of the state’s innovation strategy in the field of quantum technology and enables the IMS Chips to become a driver for innovation and development of new products in this future field.” The equipment investments, which correspond to the scientific progress in the field of semiconductor technologies such as novel quantum sensor technology, enable IMS Chips to contribute to strengthening digitalization and sustainability.