Nanopatterning Cluster+ Phase 2
Nanopatterning Cluster+ Phase 2
The REACT-EU grant financed under the European Regional Development Fund (ERDF) – Innovation and Energy Transition – during the funding period 2014 – 2020 is part of the European Union’s response to the COVID-19 pandemic by the Administrative Regulation ERDF – Expansion of Innovation Capacities – EVI 2014 – 2020 of the Ministry of Economics, Labor and Tourism.
The grant is awarded by way of partial financing for project funding for the project Nanopatterning Cluster+ Phase 2.
The grant from European Union funds to support crisis management in connection with the COVID-19 pandemic and its social consequences as well as the preparation of a green, digital and stable recovery of the economy (REACT-EU), awarded via the ERDF program Baden-Württemberg 2014 – 2020 will amount to 1,980,000 €.
Within the scope of this project, an infrastructure for the large-area and flexible fabrication and characterization of a wide variety of nano structures in and on different substrates and materials is to be created in the clean rooms of Institut für Mikroelektronik Stuttgart (IMS).
The goal is to expand and add to the capabilities already available at the IMS and, thus, facilitate the development of new types of micro- and nano-structured surfaces and structures in 2D and 2.5D as well as research into their characteristics. The project enables the variable fabrication of a wide variety of nano structures, these ranging from unique ones for research to masters for replicating processes on areas from a few square millimeters to the full area of 200 mm wafers. Applications for these nano structures can be found in a wide variety of fields, such as photonics, optics, augmented reality and diagnostics (medical technology, environmental technology, etc.).