MOCVD42

The main objective of the overall project is an increase in production capability of the MOCVD (Metal Organic Chemical Vapour Deposition) technology for applications in power electronics, in photo voltaic as well as in nano photonics and sensor technology. The technology targets the energy and e-Mobility sectors. An improvement of the technology is to be achieved through an industry 4.0 approach, which basically means networked and automated machine designs, intelligent software, analyses along detection limits and precise process control.
Electronic power converters will serve as demonstrator. In a production-related environment the possible solution are critically tested and evaluated in a real-life situation. In order to implement and verify the improvements modern GaN-based power transistors on silicon substrates are used, manufactured and analyzed.
This industry-oriented approach under production-related conditions for 200 mm wafers ensures real-life development with a high implementation potential.