DRY PROCESSING WORKSHOP: Plasma & Atomic Scale Process Techniques2024, Stuttgart
DRY PROCESSING WORKSHOP 2024
September 24 – 25, 2024, Stuttgart, Germany.
The Dry Processing Workshop is an interactive workshop for users of Oxford Instruments Plasma Technology devices. The workshop is organized by Oxford Instruments and co-organized by ZAQuant and IMS CHIPS.
The 2-day event will be held at the University of Stuttgart.
Plasma Processing Day, Tuesday, September 24, 2024
10:50 – 10:30
IMS CHIPS: Introductory presentation
Mathias Kaschel
11:45 – 12:15
Dry etching of GaN-devices for power electronics and patterning using MEMS processes
Matthias Moser & Martin Siebert
Atomic Scale Processing Day, Wensday, September 24, 2024
15:00 – 15:30
Dry etching of Silicon and Silicon Nitride waveguides using electron beam lithography
Markus Greul
For further information on the Dry Processing Workshop, please go the following website: https://www.oxinst.com/events/dry-processing-workshop-2024