European Mask and Lithography Conference (EMLC) 2024
European Mask and Lithography Conference (EMLC) 2024
June 17-19, 2024, Grenoble, France.
The IMS is represented with an “Invited Talk” at the European Mask and Lithography Conference (EMLC) 2024.
Session 10: Optical and E-Beam Direct Write, with Applications for Photonics, AR/VR and Quantum Computing
Wednesday, June 19th, 2024, 13:50 – 14:10Uhr
Kevin Edelmann
„Optimal shape approximation and writing strategy for integrated photonic waveguides using variable-shaped e-beam direct lithography“
S. Fasold, M. Greul, J. Hartbaum, E. Linn, I. Stolberg, U. Weidenmueller,
Institut für Mikroelektronik Stuttgart, Stuttgart und Vistec Electron Beam GmbH, Jena
Further information on the European Mask and Lithography Conference (EMLC) 2024 can be found on the following website: https://www.emlc-conference.com/en