Equipment purchased through REACT-EU funding put into operation
The equipment acquired through REACT-EU funding has been put into operation
August 27th, 2023.
The Ministry of Economy, Labor and Tourism has funded the acquisition of an electron beam direct writer (e-beam writer) and other equipment in the clean rooms of Institut für Mikroelektronik Stuttgart (IMS CHIPS) for a total of 8.38 million euros.
The investments were used to expand the infrastructure available at the research facility for the large-scale and flexible production and characterization of various nanostructures. The funding comes from the European Union’s “REACT-EU” program, which is assisting with crisis management of the COVID-19 pandemic.
With the acquisition of a new electron beam direct writer (E-beam), a fully automated scanning electron microscope (CD-SEM) and an atomic force microscope (AFM), the infrastructure for large-scale generation of complex nanostructures in and on different substrates and materials was expanded at IMS CHIPS. The project enables the flexible manufacturing of different nanostructures, ranging from one-offs for research to masters for replicating processes on areas from a few square millimeters to the full area of 200 mm wafers. Applications for these nanostructures can be found in a variety of fields, including photonics, optics and diagnostics. Among other things, the goal is to develop new types of quantum sensors for use in medical and environmental technology.