TAPES3 has received the KDT Technology Pioneer Award 2022

TAPES3 has been awarded the “KDT Technology Pioneer Award” at the EFECS 2022 conference in Amsterdam.

The 2022 KDT JU Technology Pioneer Award went to TAPES3 – the KDTJU project that enables the continuation of Moore’s Law by focusing on lithography, metrology and mask infrastructure to develop the next generation of technology – the 3 nm node.
The Institut für Mikroelektronik Stuttgart (IMS CHIPS) participated in the lithography and EUV mask infrastructure work packages. In the Lithography work package, ultra-precise Diffractive Optical Elements (DOE) were developed for surface inspection of EUV mirrors. In the EUV Mask Infrastructure package, IMS CHIPS explored new concepts on masks with alternative absorbers.